Low g Inertial
SPEA Rate Tables are a family of multi-axis positioners for testing MEMS accelerometers and gyroscopes. They allow the multi-site testing of up to 140 devices simultaneously, while providing precise and reliable angular position, rate and acceleration motion. Constant velocity is applied for accelerometers, while sinusoidal angular rate input is provided for gyro test. The axes are driven by torque motors, which ensure enhanced position and velocity accuracy.
The system interface, with up to 1500 x 2 wires, links the device output pins directly to the measurement instrumentation, so as to perform all the parametric measurements during the MEMS stimulation.
The Rate Tables are easy to operate: it is very simple to set instruction sequences, use direct move commands, and start the electrical measurements of the device.
They can either be embedded in integrated MEMS test cells (complete with test handler and test resources), or used as engineering units, connected to the test system, in order to perform mass production as well as engineering and prototype testing.
Main features
- High multi-site MEMS contacting unit: up to 140 devices tested in parallel
- Gyroscope test: constant velocity (trapezoidal profile with programmable velocity), sinusoidal and combined sinusoidal profiles with programmable amplitude and frequency
- Precise absolute positioning mode for accelerometer test
- High rate accuracy with no drift, excellent rate stability, high torsion stiffness
- Continuous connection to the tester during operation
- Programmable movement profiles through DLL instructions
- Accurate and reliable motion control, achieved by a servo- controlled system consisting of direct-drive DC torque motors with precise incremental optical encoders
- HF option with reserved wires for high-frequency signals up to 25MHz
- Automatic contactor cleaning and automatic device alignment, for high operation autonomy
- Device power with Kelvin contacts
- Nitrogenless tri-temp conditioning (range: -50 to 150°C)