Pressure and Environmental

SPEA pressure and environmental test units are designed for the high-performance production test of absolute and differential MEMS pressure sensors for a variety of applications, including consumer barometric, industrial, TPMS, environmental.

The integration with pick & place handler and test system provides a high-efficiency turn-key solution for lowering the cost of test: in a completely automatic machine, up to 392 devices can be contacted and tested simultaneously.

Up to 3 different test chambers can be installed within a single module, with independent generators, indicators and contacting units. The test chambers are specially designed to avoid any leakage, guaranteeing the best pressure accuracy during the test.

Dedicated controllers and thermal units allow the dynamic change of pressure and temperature values independently, even during the test execution. Temperature is generated and maintained by a fast thermal conditioning system, while the thermal chuck is placed directly in contact with the DUT, in order to ensure an optimum thermal transfer. Fast temperature change system (typical 2°C/s heating/cooling) allows the test of the devices at different set temperatures with only one pick-and-place insertion.

Main features

  • High multi-site functional test: up to 392 devices tested in parallel
  • Thermal + pressure + gas + temperature stimulus (-40 to 180°C)
  • Best pressure stability
  • Temperature change during test
  • Fast pressure change, with up to 6 tanks to speed up the set point change and settling time
  • Easy connection with SPEA testers, with up to 2,520 interface wires per chamber

Pressure ranges

  • Barometric pressure range: 0.03 to 0.13 MPaA (0.3 to 1.3 barA)
  • TPMS pressure range 1: 0.03 to 1.6 MPaA (0.3 to 16 barA)
  • TPMS pressure range 2: 0.03 to 1.1 MPaA (0.3 to 11 barA)
  • Differential pressure range: -0.07 to 0.4 MPa (-0.7 to 4 bar)
  • Extended pressure range: 0.03 to 7.05 MPa (0.3 to 70.5 barA)