Attribute | Respective Value |
XYZ travel | 300x300x250mm |
XYZ Scale Resolution | 0.1µm, with dual z axis scales standard |
Drive System | DC Servo with 4-axis control (X, Y, Z and Zoom) with multifunction handheld controller |
Worktable | Hardcoat Anodized with fixture holes, removable stage glass, 30 kg payload |
Optics | AccuCentric® auto-compensating with up to 25 calibrated position |
Illumination | LED numerical aperture matching substage |
| LED Co-axial |
| TTL surface |
| 8 sector/ 8 ring SmartRing light LED™ (White) |
Software | Zone 3 |
| Measure mind |
| Measure X |
XY Accuracy | 1.8+5L/1000 µm |
Z Accuracy | 3.4+5L/1000 µm |