Attribute | Respective Value |
XYZ Travel | 300x300x200 mm |
XYZ Scale Resolution | 0.1µm, including dual Y-axis scale |
Stage drive system | DC Servo with 4-axis control (X, Y, Z and Zoom) with multifunction handheld controller |
Worktable | Hardcoat Anodized with fixture holes, removable stage glass, 30 kg payload |
Optics | - AccuCentric® auto-compensating zoom,
- Motorized: 1.0x lens, 2.0x lens attachment
- 1.0x adaptor tube
|
Illumination | Substage LED profile (green) |
| LED Co-axial surface (white) |
| SmartRing light LED™ (White) |
Software | Zone 3 |
| Measure mind |
| Measure X |
XY Accuracy | 1.5+5L/1000 µm |
Z Accuracy | 2.5+5L/1000 µm |